Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2005-05-17
2005-05-17
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
06894781
ABSTRACT:
A method and apparatus are disclosed for accurately and repeatably determining the thickness of a thin film on a substrate. A rotating compensator ellipsometer is used which generates both 2ω and 4ω output signals. The 4ω omega signal is used to provide an indication of the temperature of the sample. This information is used to correct the analysis of the thin film based on the 2ω signal. These two different signals generated by a single device provide independent measurements of temperature and thickness and can be used to accurately analyze a sample whose temperature is unknown.
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Opsal Jon
Rosencwaig Allan
Wei Lanhua
Lauchman Layla G.
Stallman & Pollock LLP
Therma-Wave, Inc.
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