Molecular beam epitaxy equipment

Details Molecular beam epitaxy equipment Molecular beam epitaxy equipment

2006-04-04

2006-04-04

Lund, Jeffrie R. (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S7230CB, C118S726000

Reexamination Certificate

active

07021238

ABSTRACT:
Epitaxy equipment including an epitaxy chamber under vacuum containing a substrate support and at least one cell under vacuum for evaporation of epitaxy material closed by a diaphragm having at least one opening and communicating with the epitaxy chamber by a connecting flange, and a mobile plate positioned opposite the diaphragm such that the distance of the plate from an exterior surface of the diaphragm is variable and has a section corresponding to a section of the diaphragm and a molecular beam is formed at the level of a zone surrounding the plate.

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Random House Webster's Unabridged Dictionary, definition of “dihedron” p. 554, 2001.

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