Mold, production process of mold, imprint apparatus, and...

Details Mold, production process of mold, imprint apparatus, and... Mold, production process of mold, imprint apparatus, and...

2008-02-19

2010-10-19

Del Sole, Joseph S (Department: 1791)

Plastic article or earthenware shaping or treating: apparatus

Preform reshaping or resizing means: or vulcanizing means...

Surface deformation means only

C425S171000, C425S173000

Reexamination Certificate

active

07815430

ABSTRACT:
A mold for imprinting a pattern onto a resin material applied onto a substrate is constituted by a mold substrate formed of a material transparent to light in at least a part of a wavelength range of light used for alignment, an alignment structure area having an alignment structure comprising a recess portion, a pattern forming area having a pattern, and a coating layer is formed of a material having an optical characteristic different from that of the mold substrate. The coating layer is on a side wall of the recess portion.

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patent: 2000-323461 (2000-11-01), None
Chou, S. et al., “Imprint of sub-25 nm vias and trenches in polymers”, American Institute of Physics, Appl. Phys. Lett., vol. 67, No. 21, Nov. 20, 1995, pp. 3114-3116.

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