Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2005-05-03
2005-05-03
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
06888632
ABSTRACT:
An apparatus for scatterometry measurements is disclosed. The apparatus includes a modulated pump source for exciting the sample. A separate probe beam is directed to interact with the sample and the modulated optical response is measured. The measured data is subjected to a scatterometry analysis in order to evaluate geometrical sample features that induce light scattering.
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Stafira Michael P.
Stallman & Pollock LLP
Therma-Wave, Inc.
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