Modular SMIF pod breather, adsorbent, and purge cartridges

Details Modular SMIF pod breather, adsorbent, and purge cartridges Modular SMIF pod breather, adsorbent, and purge cartridges

2006-08-22

2006-08-22

Prince, Fred G. (Department: 1724)

Gas separation

Plural serial basically diverse separating media

Plural stages in unitary casing

C055S422000, C055S482000, C141S098000, C414S291000, C414S935000, C414S937000, C206S710000

Reissue Patent

active

RE039241

ABSTRACT:
Modular cartridges which may be inserted into and removed from a well or receptacle on the bottom of a pod. The cartridges may be configured to include various types and combinations of valves, filters, and/or conditioning agents. A standalone cartridge replacement station may be provided for inserting and removing various cartridges from one or more of the receptacles on the bottom of a pod while wafers are seated within the pod. The standalone replacement unit may decouple an existing cartridge from the pod by rotating the cartridge from a locked to an unlocked position and then lowering the cartridge out of the pod. Thereafter, the replacement station may insert a new cartridge up into the appropriate receptacle and rotate the cartridge into a locked position in the pod.

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