Modular ion source

Details Modular ion source Modular ion source

2004-07-21

2008-09-16

Berman, Jack I. (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C315S111810, C315S111910, C250S42300F, C250S424000, C250S426000

Reexamination Certificate

active

07425709

ABSTRACT:
A modular ion source design relies on relatively short modular core ALS components, which can be coupled together to form a longer ALS while maintaining an acceptable tolerance of the anode-cathode gap. Many of the modular components may be designed to have common characteristics so as to allow use of these components in ion sources of varying sizes. A flexible anode can adapt to inconsistencies in the ion source body and module joints to hold a uniform anode-cathode gap along the length of the ALS. A clamp configuration fixes the cooling tube to the ion source body, thereby avoiding heat-introduced warping to the source body during manufacturing.

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