Data processing: generic control systems or specific application – Generic control system – apparatus or process – Plural processors
Patent
1998-01-15
2000-08-08
Gordon, Paul P.
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Plural processors
700 9, 700 17, 700 83, 700 25, 704102, 704103, 704104, G05B 1500
Patent
active
061014192
ABSTRACT:
A modular control system for an automated manufacturing facility, especially for use with a semiconductor fabrication facility having a number of discrete process components, provides a master control computer connected by a parallel bus to a series of modular interface cards. Each of the interface cards are organized to communicate with all the I/O located on a specific process component or group of process components. A plurality of daughter cards are provided on each of the interface cards. The daughter cards contain data translation and acquisition circuitry for translating the various forms of I/O signals from and into a database format. The signal list used to communicate between the master computer and the I/O is generated at startup, enabling easy modification, addition and deletion of I/O. Network-based communication protocols can also be employed for communication between the interface cards and the master computer.
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Anderson Thomas W.
Kennedy Robert D.
Koontz Thane M.
Richmond, II Donald P.
Gordon Paul P.
Lam Research Corporation
Patel Ramesh
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