Modular control system for manufacturing facility

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Plural processors

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700 9, 700 17, 700 83, 700 25, 704102, 704103, 704104, G05B 1500

Patent

active

061014192

ABSTRACT:
A modular control system for an automated manufacturing facility, especially for use with a semiconductor fabrication facility having a number of discrete process components, provides a master control computer connected by a parallel bus to a series of modular interface cards. Each of the interface cards are organized to communicate with all the I/O located on a specific process component or group of process components. A plurality of daughter cards are provided on each of the interface cards. The daughter cards contain data translation and acquisition circuitry for translating the various forms of I/O signals from and into a database format. The signal list used to communicate between the master computer and the I/O is generated at startup, enabling easy modification, addition and deletion of I/O. Network-based communication protocols can also be employed for communication between the interface cards and the master computer.

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