Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1990-01-29
1992-04-21
Kunemund, Robert
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156614, 156DIG72, 437 80, 437 81, 437126, 437133, 437949, 437971, 148DIG57, C30B 2514
Patent
active
051064537
ABSTRACT:
In an MOCVD reactor, gases are channeled around the periphery of a baffle plate (15) so as to flow radially inwardly along a slotted injection plate (16). The slots (22) in the injection plate extend radially and are of non-uniform width so as to compensate for a non-uniform rate of deposition. The resultant flow over a rotating heated substrate (17) gives a more uniform deposit of epitaxially grown material.
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Benko John W.
Levkoff Jerome
Sutryn Daniel C.
Viriyayuthakorn Montri
Anderson R. B.
AT&T Bell Laboratories
Kunemund Robert
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