Mirror package scanning apparatus and method

Details Mirror package scanning apparatus and method Mirror package scanning apparatus and method

2008-05-13

2008-05-13

Cherry, Euncha P. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S202100

Reexamination Certificate

active

07372603

ABSTRACT:
An optical scanner system and method having a light source, a first mirror rotatable along a first torsion axis to reflect light from the light source, a first vibrator to vibrate the first mirror, a second mirror positioned adjacent to the first mirror and rotatable along a second torsion axis different from the first torsion axis, a second vibrator to vibrate the second mirror, and a mirror reflecting the light reflected from the first mirror to the second mirror. In addition, microminiaturization may be further embodied by applying an MEMS technology. Further, a vibrating body may be designed to vibrate with high frequencies by reducing the size and mass of the vibrating body. Through embodiments of the present invention, it is also possible to prevent interference between light entering a mirror package and the finally reflected light.

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patent: WO 01/33281 (2001-05-01), None
patent: WO 02/05012 (2002-01-01), None

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