Optical: systems and elements – Mirror – Including specified control or retention of the shape of a...
Reexamination Certificate
2005-09-27
2005-09-27
Sikder, Mohammad (Department: 2872)
Optical: systems and elements
Mirror
Including specified control or retention of the shape of a...
C359S847000, C359S848000, C359S849000
Reexamination Certificate
active
06948821
ABSTRACT:
A mirror arrangement for reflecting electromagnetic radiation has a mirror body with a mirror side disposed towards the radiation to be reflected and at least one extension sensor located at the mirror body for detecting a deformation state of the mirror body. The mirror body includes semiconductor layer where the at least one extension sensor is located.
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Carl Zeiss SMT AG
Osha & May L.L.P.
Sikder Mohammad
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