Millisecond annealing (DSA) edge protection

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation

Reexamination Certificate

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Details

C438S058000, C257SE31001, C257SE23114

Reexamination Certificate

active

07923280

ABSTRACT:
A method and apparatus for thermally processing a substrate is provided. A substrate is disposed within a processing chamber configured for thermal processing by directing electromagnetic energy toward a surface of the substrate. An energy blocker is provided to block at least a portion of the energy directed toward the substrate. The blocker prevents damage to the substrate from thermal stresses as the incident energy approaches an edge of the substrate.

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International Search Report and Written Opinion of the International Searching Authority mailed Jun. 25, 2009 in PCT/US2009/033102.

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