Electric heating – Metal heating – By arc
Reexamination Certificate
2006-07-25
2011-10-18
Paschall, Mark (Department: 3742)
Electric heating
Metal heating
By arc
C219S121410, C219S121440, C219S121520, C118S7230AN, C118S7230MW, C315S111210, C156S345410
Reexamination Certificate
active
08039772
ABSTRACT:
A microwave resonance plasma generating apparatus, a plasma processing system having the same and a method of generating a microwave resonance plasma are provided. The apparatus includes a microwave generating unit which generates a microwave, and a plasma producing unit which produces electrons and photons of high energy using the microwave generated from the microwave generating unit. The plasma producing unit includes a coaxial waveguide having an inner electrode disposed adjacent to the microwave generating unit, an outer electrode connected to the microwave generating unit and disposed to coaxially surround a portion of the inner electrode, the outer electrode being shorter than the inner electrode, and a dielectric tube disposed between the inner electrode and the outer electrode to insulate between the inner electrode and the outer electrode. The coaxial waveguide utilizes a principle of “cut or truncated electrode of coaxial waveguide” and a resonance phenomenon of Langmiur.
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Kossyi Igor Antonovich
Lee Young-dong
Misakyan Mamikon Aramovich
Taktakishvili Merab Ivanovich
Paschall Mark
Samsung Electronics Co,. Ltd.
Sughrue & Mion, PLLC
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