Microwave plasma source having improved switching operation from

Details Microwave plasma source having improved switching operation from Microwave plasma source having improved switching operation from

1983-07-26

1985-09-24

Paschall, M. H.

Electric heating

Metal heating

By arc

219121PG, 204192N, 204192E, 156345, 31511141, 313156, B23K 900, H01J 2700

Patent

active

045434654

ABSTRACT:
In a microwave plasma source, a discharge space supplied with a microwave electric field is supplied with a DC magnetic field. A material to be ionized is introduced into the discharge space to produce plasma, whereby ions are extracted through an ion extracting system. A switch is provided for effecting through switching operation the change-over of the magnetic field applied to the discharge space from the intensity for the ignition of plasma to the intensity for ion extraction in succession to completion of the plasma ignition.

REFERENCES:
patent: 3430138 (1964-02-01), Suzuki et al.
patent: 4058748 (1977-11-01), Sakudo et al.
patent: 4101411 (1978-07-01), Suzuki et al.
patent: 4316791 (1982-02-01), Taillet
patent: 4322661 (1982-03-01), Harvey
patent: 4362972 (1982-12-01), Donaldson

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