4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Katsunobu Abe

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Ion implantation apparatus for semiconductor manufacture

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Microwave plasma source having improved switching operation from

Electric heating – Metal heating – By arc
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Nuclear gyromagnetic resonance apparatus

Electricity: measuring and testing – Particle precession resonance – Spectrometer components
Patent

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Profile ID: LFUS-PAI-P-1362942

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