Microwave plasma source

Details Microwave plasma source Microwave plasma source

1981-11-10

1984-02-21

Envall, Jr., Roy N.

Electric heating

Metal heating

Of cylinders

219121PG, 219121PD, 219 1055A, H05G 906

Patent

active

044332289

ABSTRACT:
The microwave plasma source of this invention comprises a vacuum room which forms a discharging space with discharge gas introduced therein, a means for conducting the microwave to the discharging space so that the microwave electric field is provided in the discharging space, and a means for providing the magnetic field in the discharging space located on the microwave propagating path and made up of a permanent magnet which virtually propagates the microwave.

REFERENCES:
patent: 3467885 (1969-09-01), Cann
patent: 4049940 (1977-09-01), Moisan et al.
patent: 4286135 (1981-08-01), Green et al.
patent: 4339326 (1982-07-01), Hirose et al.

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