Microwave plasma processing apparatus and method

Details Microwave plasma processing apparatus and method Microwave plasma processing apparatus and method

1994-11-14

1999-01-19

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912141, 20429837, 156345, B23K 1000

Patent

active

058616012

ABSTRACT:
The present invention relates to a microwave plasma processing apparatus, suited for generating a plasma by using microwaves, and a processing method. Microwaves propagated through a circular waveguide are tuned in the space thereof by a microwave tuner that is installed to match the impedance, and are introduced in a uniform and most efficient state into a discharge block having a plasma-resistant inner surface that is enlarged in a tapered form through a microwave introduction window. Then, a processing gas controlled to a predetermined pressure by a gas supplying structure and gas evacuating structure is turned into a plasma which is more uniform and is more dense by interaction of a microwave electric field that is efficiently introduced and a magnetic field produced by a solenoid coil.

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patent: 5308950 (1994-05-01), Ramm et al.
patent: 5356478 (1994-10-01), Chen et al.
patent: 5387777 (1995-02-01), Bennett et al.
patent: 5410122 (1995-04-01), Su et al.
patent: 5454903 (1995-10-01), Redeker et al.
patent: 5507874 (1996-04-01), Su et al.
Declaration executed by Motoo Nagahashi.
English Translation of Japanese Patent Appln. No. 283028, filed Nov. 12, 1993.

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