Electric heating – Metal heating – By arc
Patent
1994-11-14
1999-01-19
Paschall, Mark H.
Electric heating
Metal heating
By arc
21912141, 20429837, 156345, B23K 1000
Patent
active
058616012
ABSTRACT:
The present invention relates to a microwave plasma processing apparatus, suited for generating a plasma by using microwaves, and a processing method. Microwaves propagated through a circular waveguide are tuned in the space thereof by a microwave tuner that is installed to match the impedance, and are introduced in a uniform and most efficient state into a discharge block having a plasma-resistant inner surface that is enlarged in a tapered form through a microwave introduction window. Then, a processing gas controlled to a predetermined pressure by a gas supplying structure and gas evacuating structure is turned into a plasma which is more uniform and is more dense by interaction of a microwave electric field that is efficiently introduced and a magnetic field produced by a solenoid coil.
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Declaration executed by Motoo Nagahashi.
English Translation of Japanese Patent Appln. No. 283028, filed Nov. 12, 1993.
Kakutani Hirofumi
Katamoto Mitsuru
Kawahara Hironobu
Kihara Hideki
Kudo Katsuyoshi
Hitachi , Ltd.
Paschall Mark H.
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