Microwave ion source

Details Microwave ion source Microwave ion source

1988-06-27

1989-08-15

Boudreau, Leo H.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

315 39, 31511141, 31511181, H01J 724

Patent

active

048578096

ABSTRACT:
In a microwave ion source utilizing a microwave and a magnetic field, a microwave introducing window has a multilayer structure of plates with different dielectric constants, a magnetic circuit is arranged to generate a magnetic field having a higher intensity than that defined by ECR (Electron Cyclotron Resonance) conditions so as to form a narrow high-density plasma, an ion extraction electrode has an ion extraction window whose contour falls within a center region of the narrow high-density plasma.

REFERENCES:
patent: 4058748 (1977-11-01), Sakudo et al.
patent: 4393333 (1983-07-01), Sakudo et al.
patent: 4409520 (1983-10-01), Koike et al.
patent: 4507588 (1985-03-01), Asmussan et al.
patent: 4523127 (1985-06-01), Moeller
patent: 4598231 (1986-07-01), Matsuda et al.
patent: 4631438 (1986-12-01), Jacquot
patent: 4658143 (1987-04-01), Tokiguchi et al.

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