Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Patent
1998-01-13
2000-04-18
Beck, Shrive
Coating processes
Direct application of electrical, magnetic, wave, or...
Pretreatment of substrate or post-treatment of coated substrate
4273762, 4273766, 4273977, 4274197, 427559, 427569, 427240, 4272481, 438664, 438683, B05D 306, B05D 300, H01L 2144
Patent
active
060512830
ABSTRACT:
The present invention is directed to a method of forming a new material layer or region near an interface region of two dissimilar materials, and an optional third layer, wherein at least one of said dissimilar materials or optional third is capable of being heated by microwave energy. The method of the present invention includes a step of irradiating a structure containing at least two dissimilar materials and an optional third layer under conditions effective to form the new material layer in the structure. An apparatus for conducting the microwave heating as well as the structures formed from the method are also described herein.
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I. Ursu, et al., "Titanium Silicide Synthesis as an Effect of CW CO.sub.2 -Laser Irradiation", J. Appl. Phys., 66:11, pp. 5635-5636 (1989).
Lee Kam Leung
Lewis David Andrew
Roy Ronnen Andrew
Viswanathan Raman Gobichettipalayam
Barr Michael
Beck Shrive
International Business Machines Corp.
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