Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2007-03-27
2007-03-27
Huynh, Andy (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C977S733000, C438S053000
Reexamination Certificate
active
10524560
ABSTRACT:
An electromechanical microstructure including a first mechanical part formed in a first electrically conductive material, and which includes a zone deformable in an elastic manner having a thickness value and an exposed surface, and a first organic film having a thickness, present on all of the exposed surface of the deformable zone. The thickness of the first film is such that the elastic response of the deformable zone equipped with the first film does not change by more than 5% compared to the response of the bare deformable zone, or the thickness of the first film is less than ten times the thickness of the deformable zone.
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Bureau Christophe
Kergueris Christophe
Perruchot Francois
Alchimer S.A.
Huynh Andy
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Taylor Earl
Tronic's Microsystems
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