Microscopic area scanning apparatus

Details Microscopic area scanning apparatus Microscopic area scanning apparatus

1998-06-15

2000-08-08

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

310328, G21K 510

Patent

active

061005347

ABSTRACT:
A microscopic area scanning apparatus is provided with at least three hollow cylindrical piezoelectric elements each driven in three XYZ directions by one of divided electrodes. Three or more hollow cylindrical piezoelectric elements are arranged on a circumference of a common plane. Balls are each axially provided at a free end of the hollow cylindrical piezoelectric element. Ball retainers rotatably and slidably support a respective ball in contact therewith. A sample stage is fixed to the ball retainers. A table fixes the hollow cylindrical piezoelectric elements on the circumference of the common plane. Thus, the microscopic area scanning apparatus can realize both a wide X-Y scanning range and a high Z-direction resonant frequency without utilizing an elastic hinge.

REFERENCES:
patent: 5103095 (1992-04-01), Elings et al.

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