Microscope specimen holder and grid arrangement for in-situ and

Details Microscope specimen holder and grid arrangement for in-situ and Microscope specimen holder and grid arrangement for in-situ and

1998-05-08

1999-12-14

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

378 45, 378 83, H01J 3720

Patent

active

060021365

ABSTRACT:
A specimen holder and specimen grid orientation arrangement facilitating in-situ and ex-situ repeated analysis of a specimen in a microscope. The arrangement includes a specimen grid, to which the specimen is affixed, having an alignment aid. The arrangement also includes a specimen holder having an opening. The opening repeatedly receives and supports the specimen grid. A reference aid, located in the opening of the specimen holder, engages the alignment aid on the specimen grid to orient the specimen grid in a single position within the opening of the specimen holder. In specific embodiments, the alignment aid of the specimen grid may be a notch or an aperture; the reference aid of the specimen holder may be a raised surface or a pin.

REFERENCES:
patent: 3179799 (1965-04-01), Valdre
patent: 3643091 (1972-02-01), Lucas
patent: 4596934 (1986-06-01), Yanaka et al.
patent: 4943148 (1990-07-01), Mondragon et al.
patent: 4974244 (1990-11-01), Torrisi et al.
patent: 5020088 (1991-05-01), Tobin
patent: 5225683 (1993-07-01), Suzuki et al.
patent: 5497007 (1996-03-01), Uritsky et al.
patent: 5753924 (1998-05-01), Swann
C. F. Aliotta et al., Holder For Automatic Alignment of Large Wafers in a Scanning Electron Microscope, IBM Technical Disclosure Bulletin, vol. 26, No. 10B, pp. 5479-80 (1984).
R. G. Christensen et al., Mask Aligning Fixture for Silicon Wafers, IBM Technical Disclosure Bulletin, vol. 27, No. 4B, pp. 2383-84, pp. 2383-84 (1984).
Anonymous, Microscope Wafer Orientation Fixture, IBM Research Disclosure (Oct. 1985).

Affiliated with

Also associated with

Rating

Microscope specimen holder and grid arrangement for in-situ and does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microscope specimen holder and grid arrangement for in-situ and , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microscope specimen holder and grid arrangement for in-situ and will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-865851