Microscope apparatus

Details Microscope apparatus Microscope apparatus

1989-03-01

1990-04-03

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

350507, H01J 3700

Patent

active

049142933

ABSTRACT:
A microscope apparatus includes a microscope body having a mounting section. An observation unit is removably fitted to the mounting section, and includes an objective lens unit and a tip unit. The lens unit has an objective lens opposed to an observation surface and forms an optical image of the surface viewable through the microscope body. The tip unit includes a support member attached to the mounting section, and a glass plate supported by the support member to be located between the objective lens and the observation surface. A fine conductive tip is fixed to the glass plate and extends therefrom toward the observation surface, in the direction of an optical axis of the objective lens. A piezoelectric section for shifting the glass plate is fixed to the support member.

REFERENCES:
patent: 4343993 (1982-08-01), Binning et al.
patent: 4762405 (1988-08-01), Imoue et al.
patent: 4837435 (1989-06-01), Sakuhara et al.
Scanning tunneling microscope combined with a scanning electron microscope G. Binnig et al; Feb. 1986, pp. 221-224.
Near-field optical-scanning microscopy U. Durig et al; May 15, 1986 pp. 3318-3327.

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