Microprobe for surface-scanning microscopes

Details Microprobe for surface-scanning microscopes Microprobe for surface-scanning microscopes

1996-07-01

1997-02-25

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, G01B 734, G01N 2700

Patent

active

056061625

ABSTRACT:
The invention provides, for a surface-scanning microscope, a probe having comparable stiffness in respect of deflections in two different directions, namely the direction towards and away from the surface and a direction in a plane parallel to the surface. For that purpose the probe, which comprises a support body, a resilient arm or cantilever having one end supported by the support body and another, free, end having thereon a sharp tip or stylus, has its arm or cantilever meander-shape.
The invention further provides a method making such a probe, having its support body and tip or stylus as integral parts, from a wafer of crystalline material by etching.

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