Microporous structure with layered interstitial surface treatmen

Details Microporous structure with layered interstitial surface treatmen Microporous structure with layered interstitial surface treatmen

1992-12-22

1994-05-24

Silverman, Stanley S.

Catalyst, solid sorbent, or support therefor: product or process

Catalyst or precursor therefor

Silicon containing or process of making

502259, 502260, 502332, 502335, 502336, B01J 2900

Patent

active

053148576

ABSTRACT:
A microporous structure with layered interstitial surface treatments, and method and apparatus for preparation thereof. The structure is prepared by sequentially subjecting a uniformly surface-treated structure (10a) to atomic oxygen treatment to remove an outer layer (16) of surface treatment to a generally uniform depth, and then surface treating the so exposed layer with another surface treating agent. The atomic oxygen/surface treatment steps may optionally be repeated, each successive time to a lesser depth, to produce a microporous structure having multilayered surface treatments. The apparatus (200) employs at least one side arm (228) from a main atomic oxygen-containing chamber (202). The side arm (228) has characteristic relaxation times such that a uniform atomic oxygen dose rate is delivered to a specimen (239) positioned transversely in the side arm (228) spaced from the main gas chamber (202).

REFERENCES:
patent: 3963646 (1976-06-01), Teichner et al.
patent: 4176161 (1979-11-01), Mitchell et al.
patent: 4550093 (1985-10-01), Fanelli et al.

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