Microplastic structure and method of manufacture

Details Microplastic structure and method of manufacture Microplastic structure and method of manufacture

1990-05-16

1994-09-06

Brammer, Jack P.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Including heating

427510, 430270, 430311, 430320, 430325, 430326, G03C 500

Patent

active

053447484

ABSTRACT:
Thermally stable microplastic structures and methods for their manufacture are provided. The microplastic structures are prepared from crosslinkable photosensitive compositions using a specially designed radiation attenuating photomask which permits preselection of the size, length, width and thickness of the desired structure. The microplastic structures are stable at temperatures in excess of 200.degree. C. and can be used as components in miniature electrical, mechanical, chemical and optical devices, such as smart sensors integral to a silicon chip device.

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DeForest, Photoresist, Materials and Processes, 1975, pp. 46-59.

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