Micromirror device and method for making the same

Details Micromirror device and method for making the same Micromirror device and method for making the same

2006-10-10

2006-10-10

Dang, Hung X. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224200

Reexamination Certificate

active

07119944

ABSTRACT:
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

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