Microminiature moving device

Details Microminiature moving device Microminiature moving device

2011-07-05

2011-07-05

Smith, Matthew (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C257S418000, C257S420000, C257S425000, C257SE31127, C438S048000, C438S052000, C310S309000, C361S207000, C216S002000, C216S079000

Reexamination Certificate

active

07973373

ABSTRACT:
A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single -crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.

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