Microminiature cantilever stylus

Details Microminiature cantilever stylus Microminiature cantilever stylus

1989-01-17

1990-07-24

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

33556, 33558, 33561, 156647, 73105, G01B 528, G01C 700, H01J 3726, H01L 21306

Patent

active

049437194

ABSTRACT:
Integral sharp tips on thin film cantilevers are produced by forming a rectangular silicon post on a (100) silicon wafer. Etching the top of the post leaves sharp silicon tips at the corners of what remains of the silicon post. A silicon dioxide cantilever with an integral tip is thermally grown over the silicon wafer and the sharp silicon tips.

REFERENCES:
patent: 3977925 (1976-08-01), Schwabe
patent: 4312117 (1982-01-01), Robillard et al.
patent: 4668865 (1987-05-01), Gimzewski et al.
patent: 4806755 (1989-02-01), Duerig et al.
Petersen, IEEE Transactions on Electron Devices, vol. ED-25, No. 10, Oct. 1978, pp. 1241-1250.
Angell et al., Scientific American, vol. 248, No. 4, pp. 36-47 (Apr. 1983).

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