Micromechanical speed sensor

Details Micromechanical speed sensor Micromechanical speed sensor

2005-05-31

2005-05-31

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504140

Reexamination Certificate

active

06898972

ABSTRACT:
A micromechanical rotation speed sensor with a gimbals-mounted structure capable of vibration includes two vibration elements (4, 5) which are swivelled about two axes (A, B) oriented perpendicular toward each other. An excitation unit in the form of an electrode (7) sets the first vibration element (4) into a vibration about the first axis of rotation (A). A read out unit in the form of a read out electrode (8) records a tipping or vibration of the second vibration element (5) about the second axis of rotation (B) as a measure for the rotation speed of the sensor. Additional mass elements (6a,6b) which are symmetrically aligned are situated on the upper side (2a) and the underside (2b) of the first vibration element (4) which form a rocker. The sensor is manufactured of at least three individually processed wafers which are finally joined together and form a top part (1), a midsection (2) and a bottom part (3).

REFERENCES:
patent: 4598585 (1986-07-01), Boxenhorn
patent: 5016072 (1991-05-01), Greiff
patent: 5195371 (1993-03-01), Greiff
patent: 5203208 (1993-04-01), Bernstein
patent: 5408877 (1995-04-01), Greiff et al.
patent: 6032531 (2000-03-01), Roszhart
patent: 3509948 (1986-07-01), None

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