Micromechanical device with reduced load relaxation

Details Micromechanical device with reduced load relaxation Micromechanical device with reduced load relaxation

1996-12-20

1999-08-24

Wyszomierski, George

Metal treatment

Stock

Amorphous, i.e., glassy

148437, 420552, C22C 4508

Patent

active

059420545

ABSTRACT:
An improved elastic member (24) for micromechanical devices (12). The micromechanical device (12) includes a stationary member (28) and a moving member (26) which are connected together by a elastic member (24). Because of repeated and frequent movement of the moving member (26), the elastic member (24) can become permanently flexed or deformed, resulting in poor operation of the device. Aluminum alloys are formed to include oxygen, in combination with nitrogen if desired, to obtain a film with dramatically reduced load relaxation characteristics. Oxygen is added to an Argon sputter gas during deposition, and an amorphous film is produced.

REFERENCES:
patent: 4837094 (1989-06-01), Kudo
patent: 5061049 (1991-10-01), Hornbeck
patent: 5413974 (1995-05-01), Yokoyama et al.
patent: 5552924 (1996-09-01), Tregilgas

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