Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate
2005-06-14
2005-06-14
Prenty, Mark V. (Department: 2822)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
C257S532000, C257S536000, C073S031060
Reexamination Certificate
active
06906392
ABSTRACT:
A micromechanical component includes a substrate and a cover layer deposited on the substrate, underneath the cover layer, a region of porous material being provided which mechanically supports and thermally insulates the cover layer. On the cover layer, a heating device is provided to heat the cover layer above the region; and above the region, a detector is provided to measure an electric property of a heated medium provided above the region on the cover layer.
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Artmann Hans
Bauer Michael
Benzel Hubert
Krummel Christian
Pannek Thorsten
Kenyon & Kenyon
paragon
Prenty Mark V.
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