Micromachining process for making perfect exterior corner in an

Details Micromachining process for making perfect exterior corner in an Micromachining process for making perfect exterior corner in an

1993-02-25

1994-08-16

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156643, 156651, 156644, 156657, 1566611, 156662, H01L 21306, B44C 122, C03C 1500

Patent

active

053384008

ABSTRACT:
A process for forming a three-dimensional structure etched in a substrate with perfect convex corners includes partitioning the structure into two features such that the exterior corners are formed by the intersection of the two features; etching the first feature; forming an etch mask on the surface and on the substrate of the etched first feature; opening a window in the etch mask on the substrate to define the second feature; and etching the second feature, thereby obtaining the desired structure.

REFERENCES:
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patent: 4417946 (1983-11-01), Bohlen et al.
patent: 4662984 (1987-05-01), Ohtake et al.
patent: 4733823 (1988-03-01), Waggener
patent: 4869780 (1989-09-01), Yang et al.
patent: 4981552 (1991-01-01), Mikkor
patent: 5124281 (1992-06-01), Ackerman et al.
patent: 5182227 (1993-01-01), Matsukawa
patent: 5204690 (1993-04-01), Lorenze et al.
Leone et al., Fabricating Shaped Grid and Aperture Holes, IBM Technical Disclosure Bulletin, vol. 14, No. 2, Jul. 1971, pp. 417-418.

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