Micromachined transducer integrated with a charge pump

Details Micromachined transducer integrated with a charge pump Micromachined transducer integrated with a charge pump

2006-05-17

2011-10-11

Wilczewski, Mary (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

Reexamination Certificate

active

08035148

ABSTRACT:
An integrated circuit includes a micromachined transducer and a charge pump. More particularly, on one silicon substrate, a control circuit delivers high voltage from the charge pump to operate the transducer. An electronic apparatus, such as a cell phone or automatic test equipment may include such an integrated circuit.

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