Micromachined optical pressure sensor

Details Micromachined optical pressure sensor Micromachined optical pressure sensor

2004-12-16

2008-10-21

Pak, Sung (Department: 2874)

Optical waveguides

Optical waveguide sensor

Including physical deformation or movement of waveguide

Reexamination Certificate

active

07440645

ABSTRACT:
A pressure sensor including: a deflectable diaphragm including a substantially central boss and channel; and, an optical waveguide having first and second arms, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel.

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