4. Electrical resistors
  5. Resistance value responsive to a condition
  6. Fluid- or gas pressure-actuated

Joseph VanDeWeert

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Micromachined optical pressure sensor

Optical waveguides – Optical waveguide sensor – Including physical deformation or movement of waveguide
Reexamination Certificate

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Pressure transducer employing on-chip resistor compensation

Electrical resistors – Resistance value responsive to a condition – Fluid- or gas pressure-actuated
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2710753

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