Microlens forming method

Details Microlens forming method Microlens forming method

1992-06-03

1994-06-28

Lusignan, Michael

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

427162, 430323, 430324, 430330, 430394, G03F 700

Patent

active

053246233

ABSTRACT:
A method of forming a microlens made of a thermoplastic resin on a solid-state imaging device, including the steps of forming a resist pattern having an opening as a microlens forming portion on the solid-state imaging device; filling the opening with the thermoplastic resin; removing the resist pattern; and thermally deforming the thermoplastic resin on the opening. Accordingly, a microlens having a desired shape can be formed with a fine lens pattern of 0.5 .mu.m or less uniformly and highly accurately.

REFERENCES:
patent: 4689291 (1987-08-01), Popovic et al.
patent: 4839250 (1989-06-01), Cowan
patent: 4999234 (1991-03-01), Cowan
patent: 5230990 (1993-07-01), Iwasaki et al.
"Optical and Sub-Optical Imaging Technique Using Optical Imaging", IBM Technical Disclosure Bulletin, vol. 32, No. 5B, Oct. 1989, pp. 435-436.
Daly et al., "The Manufacture of Microlenses by Melting Photoresist", Measurement Science and Technology, vol. I, No. 8, pp. 759-766 (1990).

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