Microlens formation through focal plane control of a aerial imag

Details Microlens formation through focal plane control of a aerial imag Microlens formation through focal plane control of a aerial imag

1998-03-31

2000-07-04

Vargot, Mathieu D.

Plastic and nonmetallic article shaping or treating: processes

Optical article shaping or treating

Utilizing plasma, electric, electromagnetic, particulate, or...

216 26, 264 21, B29D 1100

Patent

active

060834293

ABSTRACT:
An improved method and apparatus for forming microlenses is described. The method involves defocusing light from a mask during semiconductor processing to control the curvature of microlenses being formed.

REFERENCES:
patent: 5148322 (1992-09-01), Aoyama et al.
patent: 5574580 (1996-11-01), Ansley
patent: 5768022 (1998-06-01), Lawandy
patent: 5770123 (1998-06-01), Hatakeyama et al.
patent: 5830605 (1998-11-01), Umeki et al.

Affiliated with

Also associated with

Rating

Microlens formation through focal plane control of a aerial imag does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microlens formation through focal plane control of a aerial imag, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microlens formation through focal plane control of a aerial imag will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1482978