Microfluidic chip and method of fabricating the same

Details Microfluidic chip and method of fabricating the same Microfluidic chip and method of fabricating the same

2007-11-05

2010-12-28

Warden, Jill (Department: 1797)

Chemical apparatus and process disinfecting, deodorizing, preser

Control element responsive to a sensed operating condition

C427S154000, C216S067000, C430S324000, C428S040100

Reexamination Certificate

active

07858042

ABSTRACT:
Provided are a microfluidic chip and a method of fabricating the same. The microfluidic chip includes: a lower substrate; an upper substrate formed of a silicone resin, wherein the lower substrate and the upper substrate, bonded together, provide a channel through which a fluid can flow and a chamber to receive the fluid; and an organic thin film formed on the upper surface of the lower substrate except for portions on which the lower substrate and the upper substrate are attached to each other.

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Lee et al. “A new method using photocatalytic lithography and selective atomic layer deposition” J. Am. Chem. Soc. 2004, vol. 126, pp. 28-29.
Kubo et al. “Mechanisms and Resolutions of Photocatalytic Lithography.” J. Phys. Chem. B., vol. 108, 2004, pp. 3005-3009.

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