Microfabrication of cantilevers using sacrificial templates

Measuring and testing – Surface and cutting edge testing – Roughness

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

G01B 734

Patent

active

060166932

ABSTRACT:
A sacrificial cantilever is used as a template for making cantilevers of non-standard materials for use in an atomic force microscope. The desired metal is deposited onto the sacrificial cantilever, followed by removal of the sacrificial cantilever.

REFERENCES:
patent: 5276672 (1994-01-01), Miyazaki et al.
patent: 5606162 (1997-02-01), Buser et al.
patent: 5753912 (1998-05-01), Matsuyama
M. Farooqui et al., "Micromachined Silicon Sensors for Atomic Force Microscopy", Nanotechnology, vol. 3, 1992, pp. 91-97.
T. Schaffer et al., "An Atomic Force Microscope for Small Cantilevers", SPIE Proceedings, Micromachining and Imaging, vol. 3009, Feb. 13, 1997, pp. 48-52.
T.R. Albrecht, S. Akamine, T.E. Carver, and C.F. Quate, Microfabrication Cantilever Styli for the Atomic Force Microscope, J. Vac. Sci. Technol., A84, 3386, Jul./Aug. 1990.
O. Wolter, Th. Bayer, and J. Greschner, "Micromachined Silicon Sensors for Scanning Force Microscopy", J. Vac. Sci. Technol. B9(2), 1353, Mar./Apr. 1991.
H.J. Mamin, L.S. Fan, S. Hoen, D. Rugar, "Tip-based data storage using micromechanical cantilevers", Sensors and Actuators, A48, 215-219, 1995.
Jan. P. Rasmussen, Peter T. Tang, Curt Sander, Ole Hansen and Per Moller, "Fabrication of an All-Metal Atomic Force Microscope Probe", Proceedings of Transducers 97, Chicago, Jun. 16-19, 1997, p. 463.
Kirsten Ingolf Schiffmann, "Investigation of fabrication parameters for the electon-beam-induced deposition of contamination tips used in atomic force microscopy", Nanotechnology, 4, 163-169, 1993.
Rudiger Berger, Emmanuel Delamarche, Hans Peter Lang, Christoph Gerber, James K. Gimzewski, Ernst Meyer, Hans-Joachim Guntherodt, "Surface Stress in the Self-Assembly of Alkanethiols on Gold", Science, vol. 276, 2021, Jun. 1997.
D.A. Walters, J.P. Cleveland, N.H. Thomson, P.K. Hansma, M.A. Wendman, G. Gurley, and V. Elings, "Short Cantilevers for Atomic Force Microscopy", Rev. Sci. Instrum. 67, 3583-3590 (1996).
D.A. Walters, M.B. Viani, G.T. Paloczi, T.E. Schaffer, J.P. Cleveland, M. Wendman, G. Gurley, V. Elings and P.K. Hansma, "Atomic Force Microscopy Using Small Cantilevers", SPIE, Proceedings Micro-Machining and Imaging 3009, 48 (1997).
Milan Mrksich and George M. Whitesides, "Patterning self-assembled monolayers using microcontact printing: a new technology for biosensors?" Tibtech, vol. 23, 228, Jun. 1995.
S.R.Manalis, S.C. Minne, C.F.Quate, "Atomic force microscopy for high speed imaging using cantilevers with an integrated actuator and sensor," Applied Physics Letters, vol. 68 (No. 6) 872-873, Feb. 1996.
Ami Chand et al., "Electrochemical etch-stop technique using diffused p-n junction for silicon micromechanical structures," VIII Internation Aowrkshop on Physics of Semiconductor Devices, NPL, New Delhi (India) Dec. 11-16, 1995, pp. 484-487.
Sudhir Chandra, et al "Design and Development of microstructures for MEMS applications," SPIE's 1997 Symposium on Micromachining an Microfabrication, Sep. 29-30, 1997, Austin, Texas, USA.
Sudhir Chandra et al. "Development of P+ Silicon Electrostatic Microactuator Using Direct Wafer Bonding Technology", 7th International Symposium on IC Technology Systems and Applications (ISIC-97), sponsored by IEEE, Nanyang Technological University, Singapore Sep. 10-12, 1997.
Ami Chand et al. "Realization of oxide cantilever beams using silicon micromachining technology" 2nd National Seminar on Physics and Technology of sensors, PU, Pune (India) Feb. 2-4, 1995, p. C36-1.
C.B.Prater et al. "Improved Scanning Ion-Conductance Microscopy Using Microfabricated Probes" Rev. Sci. Instrum. 62, 2634 (1991).
J.P.Cleveland et al "A nondestructive Method for Determining the Spring Constant of Cantilevers for the Scanning Force Microscopy" Rev. Sci. Instrum. vol. 64, No. 02, 403-405 (1993).
D. A. Walters, et cl. "Atomic Force Microscopy Integrated with a Scanning Electron Microscope for Tip Fabrication" App. Phys. Lett. vol. 65, No. 6, 787 (1994).
M. Radmacher, et al. "Scanning Nearfield Optical Microscope using Microfabricated Probes", Rev. Sci. Instrum. 65, 2737 (1994).
M. Radmacher et al., "Improvement of Thermally Induced Bending of Cantilevers used for Atomic Force Microscopy" Scanning vol. 17, No. 2, 117 (1995).
E. Betzig et al., "Fiber laser probe for near-field scanning optical microscopy" App. Phys. Lett. Dec. 27, 1994, vol. 63, (No. 26) 3550-2.
T.E.Schaffer, J.P.Cleveland, F.Ohnesorge,D.A.Walters, and P.K.Hansma, Studies of vibrating atomic force microscopy canilevers in liquid, J.App.Phys.80(7), Oct. 1, 1996, pp. 3622-3627.
Minne, Stephen Charles, Increasing the Throughput of Atomic Force Microscopy, A dissertation submitted to the Department of Electrical Engineering and the Committee on Graduate Studies of Stanford University, UMI Microform 9702945, 1996.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Microfabrication of cantilevers using sacrificial templates does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microfabrication of cantilevers using sacrificial templates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microfabrication of cantilevers using sacrificial templates will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2309214

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.