Microfabrication apparatus and microfabrication method

Details Microfabrication apparatus and microfabrication method Microfabrication apparatus and microfabrication method

2005-05-17

2005-05-17

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S307000, C250S492210

Reexamination Certificate

active

06894287

ABSTRACT:
A microfabrication apparatus and a microfabrication method that, using a mechanical probe formed at its tip with a microscopic rod in sample preparation, can improve the life of the probe to 10 to 300 times from conventional 3 to 5 times in terms of the number of sample preparation enabling times.

REFERENCES:
patent: 6538254 (2003-03-01), Tomimatsu et al.
patent: 6717156 (2004-04-01), Sugaya et al.

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