Microfabricated cantilever stylus with integrated pyramidal tip

Details Microfabricated cantilever stylus with integrated pyramidal tip Microfabricated cantilever stylus with integrated pyramidal tip

1994-01-07

1995-03-21

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156655, 156657, H01L 21603

Patent

active

053992326

ABSTRACT:
A dielectric cantilever arm stylus with an integrally formed pyramidal tip is provided. The tip is molded in a pyramidal pit etched in a later-removed (100) silicon substrate. An integrally-formed cantilever arm is also formed as the tip is being formed. Various thin film materials form the cantilever arm and the tip. In one embodiment of the invention, the dielectric is silicon nitride. The cantilever arm is anodically bonded to a glass block.

REFERENCES:
patent: 4307507 (1981-12-01), Gray et al.
patent: 4312117 (1982-01-01), Robillard et al.
patent: 4916002 (1990-04-01), Carver
patent: 5017266 (1991-05-01), Zdeblick et al.
patent: 5116462 (1992-05-01), Bartha et al.
patent: 5221415 (1993-06-01), Albrecht et al.

Affiliated with

Also associated with

Rating

Microfabricated cantilever stylus with integrated pyramidal tip does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microfabricated cantilever stylus with integrated pyramidal tip, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microfabricated cantilever stylus with integrated pyramidal tip will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1146623