Microfabricated cantilever stylus with integrated conical tip

Details Microfabricated cantilever stylus with integrated conical tip Microfabricated cantilever stylus with integrated conical tip

1989-06-20

1990-11-06

Dees, Jose

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430323, 430324, 156643, 156651, 156654, 1566591, 156662, 369170, 369173, G03C 500

Patent

active

049685856

ABSTRACT:
A cantilever stylus with an integrally formed conical tip is provided for atomic force microscopy AFM. The method for forming a stylus includes forming a circular masking pattern on the surface of a silicon substrate and anisotropically etching the silicon to form a post under the masking pattern. The post is then isotropically etched to produce a conical silicon tip mold. In one embodiment of the invention the silicon substrate and the conical silicon tip mold are thermally oxidized to form a cantilever stylus having including a cantilever arm with a conical tip fixed to its free end. In another embodiment of the invention the silicon substrate and the conical silicon tip mold are coated with a thin film of a dielectric material to form a cantilever stylus with a conical tip. In this embodiment the backside of the stylus is coated with a conductive material and a strong electric field is applied to the tip to cause electromigration of the conductive material to the point of the tip.

REFERENCES:
patent: 4282311 (1981-08-01), Dinardo
patent: 4284712 (1981-08-01), James
patent: 4297312 (1981-10-01), Carroll et al.
patent: 4916002 (1990-04-01), Carver

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