Microelectro mechanical system switch

Details Microelectro mechanical system switch Microelectro mechanical system switch

2005-11-01

2005-11-01

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Long line elements and components

Switch

C200S181000

Reexamination Certificate

active

06960971

ABSTRACT:
Provided is a microelectro mechanical system (MEMS). The provided MEMS switch includes a substrate; a signal line formed on the substrate; a beam deformed by an electrostatic force to electrically switch with the signal line; and a spring type contact unit formed on the signal line to electrically contact the beam and elastically deformed by an external force. Thus, stability of the contact between the contact unit and the beam is improved. In particular, even when the beam or the contact unit under the beam is unbalanced, the contact unit can elastically contact the beam to obtain a stable electrical switching operation.

REFERENCES:
patent: 5619061 (1997-04-01), Goldsmith et al.
patent: 6621022 (2003-09-01), Ma et al.
patent: 6686820 (2004-02-01), Ma et al.
patent: 6753582 (2004-06-01), Ma
patent: 6753747 (2004-06-01), Ma
patent: 6794101 (2004-09-01), Liu et al.

Affiliated with

Also associated with

Rating

Microelectro mechanical system switch does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microelectro mechanical system switch, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microelectro mechanical system switch will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3498849