Microcoaxial probes made from strained semiconductor bilayers

Details Microcoaxial probes made from strained semiconductor bilayers Microcoaxial probes made from strained semiconductor bilayers

2006-09-11

2009-02-03

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C073S105000, C324S637000, C324S638000, C977S875000, C977S878000, C977S879000

Reexamination Certificate

active

07485857

ABSTRACT:
The present invention provides microcoaxial probes fabricated from semiconductor heterostructures that include strained semiconductor bilayers. The microcoaxial probes are well suited for use as scanning probes in scanning probe microscopy, including scanning tunneling microscopy (STM), atomic force microscopy (AFM), scanning microwave microscopy, or a combination thereof.

REFERENCES:
patent: 5504366 (1996-04-01), Weiss et al.
patent: 5559328 (1996-09-01), Weiss et al.
patent: 5821410 (1998-10-01), Xiang et al.
patent: 2003/0034453 (2003-02-01), Ookubo et al.
Feenstra, B.J., et al., “Near-Field Scanning Microwave Microscopy: Measuring Local Microwave Properties and Electric Field Distributions,” Center for Superconductivity Research, Department of Physics, University of Maryland, College Park, MD, Mar. 4, 1998.
Prinz, V. Ya, et al., “Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays,” Physica E, vol. 6, 828-831, 2000, published by Elsevier Science B.V.
Golod, S.V., et al., “Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils,” Semiconductor Science and Technology, vol. 16, 181-185, 2001, published by Institute of Physics Publishing.
Schmidt, O.G., et al., “Free-standing SiGe-based nanopipelines on Si (001) substrates,” Applied Physics Letters, vol. 76, No. 21, May 21, 2001.
Prinz, V Ya, et al., “A new technique for fabricating three-dimensional micro- and nanostructures of various shapes,” Nanotechnology, vol. 12, 399-402, Nov. 27, 2001, published by Institute of Physics Publishing.
Schmidt, O.G., et al., “Free-standing semiconductor micro- and nano-objects,” Materials Science and Engineering C 19, 393-396, 2002.
Schmidt, O.G., “Semiconductor tubes, rods and rings of nanometer and micrometer dimension,” Physica E, vol. 13, 969-973, 2002, published by Elsevier Science B.V.
Prinz, A., et al., “Application of semiconductor micro- and nanotubes in biology,” Surface Science 532-535, 911-915, 2003, published by Science Direct, Elsevier Science B.V.
Park, Jewook, et al., “Observation of biological samples using a scanning microwave microscope,” Ultramicroscopy, vol. 102, 101-106, Sep. 7, 2004, published by Science Direct, Elsevier Science B.V.
Hipps, K.W., “Scanning Tunneling Spectroscopy,” A Chapter inHandbook of Applied Solid State Spectroscopy, Department of Chemistry and Materials Science Program, Washington State University, Pullman, WA, Mar. 2005.
Huang, M., et al., “Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication,” Advanced Materials, vol. 17, Issue 23, pp. 2860-2864, Oct. 19, 2005.
Qin, H., et al., “Formation of microtubes from strained SiGe/Si heterostructures,” New Journal of Physics, vol. 7, p. 241, Nov. 29, 2005 (doi: 10.1088/1367-2630/7/1/241).

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