Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1997-03-05
1999-03-09
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
G02B 5124
Patent
active
058804676
ABSTRACT:
Spectroscopic materials analysis wherein a sample under test is bombarded by electrons in a scanning electron microscope to produce an x-ray emission collected over a large solid angle by a polycapillary lens and focused onto the surface of a microcalorimeter detector. The x-ray lens is used to increase the effective collection area of the microcalorimeter detector used in an x-ray spectrometer. By increasing the collection angle, the time period for x-ray collection is reduced and the detector can be located farther from the x-ray source. The x-ray lens is effective over a broad energy range of x-rays, thus providing compatibility with spectroscopic analysis. The microcalorimeter can be calibrated to compensate for any variations in the transmission efficiency of the x-ray lens.
REFERENCES:
patent: 3582653 (1971-06-01), Howard
patent: 4058486 (1977-11-01), Mallozzi et al.
patent: 4953188 (1990-08-01), Siegal et al.
patent: 5119411 (1992-06-01), Nakamura et al.
patent: 5192869 (1993-03-01), Kumakhov et al.
patent: 5204887 (1993-04-01), Hayashida et al.
patent: 5210779 (1993-05-01), Vali et al.
patent: 5434901 (1995-07-01), Nagai
patent: 5497008 (1996-03-01), Kumakhov et al.
patent: 5550887 (1996-08-01), Schmal et al.
patent: 5570408 (1996-10-01), Gibson
patent: 5634718 (1997-06-01), Martinis et al.
Irwin, Hilton, Wollman, & Cabrera, "A Hot-Electron Microcalorimeter for Xy Detection Using a Superconducting Transition-Edge Sensor Microcalorimeter with Electrothermal Feedback," Elsevier Science, Jan. 1996, pp. 177-179.
Bly & Gibson, "Polycapillary Optics Focus and Collimate X-Rays", Lasers Focus World, Mar. 1996.
Irwin, Hilton, Wollman & Martinis, "X-Ray Detection Using a Superconducting Transition-Edge Sensor Microcalorimeter with Electrothermal Feedback," Appl. Phys. Lett. 69 (13), Sep. 23, 1996, pp. 1945-1947.
Downing Robert Gregory
Gibson Walter Maxwell
Hilton Gene Charles
Irwin Kent David
Martinis John Matthew
Nguyen Kiet T.
The United States of America as represented by the Secretary of
LandOfFree
Microcalorimeter x-ray detectors with x-ray lens does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Microcalorimeter x-ray detectors with x-ray lens, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microcalorimeter x-ray detectors with x-ray lens will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1323750