Micro-wave plasma device with a metal cooling wire wrapped aroun

Details Micro-wave plasma device with a metal cooling wire wrapped aroun Micro-wave plasma device with a metal cooling wire wrapped aroun

1998-02-19

1999-07-27

Pascal, Robert

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31323131, H05H 146

Patent

active

059295708

ABSTRACT:
This invention is concerned with providing a micro-wave plasma generating device of a simple structure and with good cooling effect of the insulating tube. Micro-wave plasma generating device which generates the plasma by introduction of a processing gas into the insulating tube transversing through the micro-wave waveguide in which the metal wire or the metal rod is spirally wound on and around the insulating tube. An air-blowing means is further provided at a portion of the insulating tube through which the waveguide transverses. The metal wire wound around the insulating tube may be affixed to the tube using solder.

REFERENCES:
patent: 4339326 (1982-07-01), Hirose et al.
patent: 4893584 (1990-01-01), Doehler et al.
patent: 5389153 (1995-02-01), Paranjpe et al.
patent: 5568015 (1996-10-01), Holber et al.

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