Micro stage with 6 degrees of freedom

Details Micro stage with 6 degrees of freedom Micro stage with 6 degrees of freedom

2008-03-14

2011-12-27

Leung, Quyen (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S012030, C310S012140, C310S012190

Reexamination Certificate

active

08084897

ABSTRACT:
A micro stage with 6 degrees of freedom used in super-precise processing and sensing equipment fields is disclosed. The micro stage has three sets of electromagnetic driving units arranged in a horizontal plane for driving the micro stage to obtain movements within the horizontal plane with 3 degrees of freedom in X, Y and θzdirections and three electromagnetic driving units arranged in a vertical direction for driving the micro stage to obtain additional movements with 3 degrees of freedom in Z, θxand θydirections. Direct driving by electromagnetic force is used in the invention. The invention is also applicable in super-precise processing and sensing fields for achieving 6 degree-of-freedom motions. The micro stage, which operates on the basis of Lorentz Law, provides a linear relation between the output pushing force and the input electrical current.

REFERENCES:
patent: 6069416 (2000-05-01), Chitayat
patent: 2005/0168076 (2005-08-01), Hazelton
patent: 2006/0061218 (2006-03-01), Hazelton
patent: 1669744 (2005-09-01), None
patent: 101078889 (2007-11-01), None
patent: 0342639 (1989-11-01), None
International Search Report dated Jun. 19, 2008.

Affiliated with

Also associated with

Rating

Micro stage with 6 degrees of freedom does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro stage with 6 degrees of freedom, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro stage with 6 degrees of freedom will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4271288