Micro-sample pick-up apparatus and micro-sample pick-up method

Details Micro-sample pick-up apparatus and micro-sample pick-up method Micro-sample pick-up apparatus and micro-sample pick-up method

2006-06-27

2006-06-27

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S559270, C250S310000, C250S311000

Reexamination Certificate

active

07067823

ABSTRACT:
A micro-sample pick-up apparatus has a probe for picking up a micro sample, a probe holder for holding the probe, an XYZ driver mechanism for moving the probe holder in the three-dimensional directions of X, Y and Z, and an observation mechanism for observing the sample and the probe. A low-vibration rotary mechanism disposed in the probe holder for rotating the probe about an axis of the probe.

REFERENCES:
patent: 6420722 (2002-07-01), Moore et al.
patent: 6781125 (2004-08-01), Tokuda et al.

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