Micro pump

Pumps – Expansion and contraction of pump fluid

Reexamination Certificate

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Details

C417S207000, C417S209000, C251S011000, C251S129010

Reexamination Certificate

active

07896621

ABSTRACT:
Provided is a micro pump having a simple structure. The micro pump includes a pump chamber including inflow and outflow passages through which a drive fluid flows, a first valve configured to open or close the inflow passage, a second valve configured to open or close the outflow passage, and a pump chamber heating and cooling unit configured to heat or cool the pump chamber.

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D.D.L. Wijngaards et al. “Design and Fabrication of on-chip integrated polySiGe and polySi Peltier Devices,” 2000, Sensors and Actuators 85, pp. 316-323.
Japanese Office Action corresponding with Japanese Patent Application No. 2005-353509; Dated Jul. 8, 2008.

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